Surface structures from NH3 chemisorption in CVD and ALD of AlN, GaN and InN films
Aluminum nitride (AlN), gallium nitride (GaN) and indium nitride (InN) {form|type|kind} a {family|family members|loved ones|household} of technologically {important|essential|crucial|critical|significant|vital} semiconductors of {high|higher} {importance|significance|value} to light-emitting diodes and {high|higher} frequency electronics. {Although|Even…